장비설명
XPS(X-ray photoelectron spectroscopy) used for materials surface characterization with unrivalled automation and easily. Spectroscopy and imaging results will be complemented by additional surface analysis techniques such as: ultraviolet photoemission spectroscopy(UPS), Auger electron spectroscopy(AES) and reflected electron energy loss
spectroscopy(REELS).
구성 및 성능
1. Electron energy analyser with automated lens system
2. Automated monochromatic micro focus X-ray source
3. UHV analysis chamber and pumping system
4. Load lock chamber and pumping system
5. Automated five axis manipulator
6. Dual mode ion cluster source
7. Automated UPS(Ultraviolet Photoelectron Spectroscopy) package
8. Field emission electron source for SEM, SAM, AES
9. Reflected electron energy loss spectroscopy(REELS)
10. Glove box
11. Data system
12. Water chiller and re-circulator
